Conformal MOVPE of (Al)GaAs on silicon using alternative chlorine-containing precursors

Philippens, M. (Author); Oligschlaeger, R. (Author); Gerard, B. (Author); Rushworth, S. (Author); Gil-Lafon, E. (Author); Napierala, J. (Author); Jimenez, J. (Author); Heime, Klaus (Author)

Amsterdam / Elsevier [u.a.] (2000) [Contribution to a conference proceedings, Journal Article]

Journal of crystal growth
Volume: 221
Page(s): 225-230

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